GLAS-PPE/2003-17

3D-RID micromachining for radiation imaging detectors

Val O'Shea

Recent advances in the technology of micro-machining have enabled novel topologies for radiation detector design to be proposed. This paper will describe some of the work that is being carried out to develope detector structures with enhanced detection efficiency for x-rays, reduced cross-talk and edgeless operation. All of these are essential characteristics of detectors that are needed to make large area arrays (20X40 cm) for x-ray imaging with better performance than the flat panels currently available. Other configurations such as scintillator filled structures and structures filled with other materials will also be described.

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